»ç¼¼È®Àå¿¡ µû¸¥ ä¿ë
[Æ÷Áö¼Ç]
- ¹ÝµµÃ¼ ÆÐŰÁö ±âÆÇ(Substrate) (µµ±Ý °øÁ¤) ¼Â¾÷ ¹× ¾ÈÁ¤È °úÂ÷Àå±Þ
[ÁÖ¿äȰ¿ëºÐ¾ß]
¹ÝµµÃ¼ ÆÐŰÁö¿ë ±âÆÇÀÇ µµ±Ý ¶óÀÎ ±¸Ãà ¹× °øÁ¤ ǰÁú ¾ÈÁ¤È
- µµ±Ý °øÁ¤(µ¿µµ±Ý, ¹«ÀüÇØ µ¿µµ±Ý) ¶óÀÎ ¼Â¾÷
- ¼³ºñ »ó¼¼ »ç¾ç È®Á¤¹× ¼³ºñ ¼Â¾÷
- Ç¥ÁØ ¼ö¸³, »ý»ê Á¶±â ¾ÈÁ¤È, ÷°¡Á¦ ºÐ¼®/°ü¸®
- DRAM ¹× mobile DRAM¿ë ±âÆÇ(substrate)ÀÇ °øÁ¤ °ü¸®
[ÀÚ°Ý¿ä°Ç]
- Çлç ÀÌ»ó (Àü°ø ¹«°ü)
- ¿µ¾î ºñÁö´Ï½º È¸È °¡´ÉÇϽŠºÐ
- ¹ÝµµÃ¼ ÆÐŰÁö¿ë ±âÆÇÀÇ µµ±Ý ¶óÀα¸Ãà °æÇè(°æ·Â 10³â ì¤ß¾)
- Cu Fill µµ±Ý °øÁ¤ ¼³°è ¹× ¼³ºñ Set-up Áö½Ä
- µµ±Ý °øÁ¤ Àü¹® Áö½Ä
- DRAM ¹× mobile DRAM¿ë ±âÆÇ(substrate)ÀÇ Á¦Ç°Áö½Ä
- ¹ÝµµÃ¼ ÆÐŰÁö¿ë ±âÆÇÀÇ °³¹ß/±â¼úºÎ¼ ±Ù¹« °æÇèÀÚ (Çʼö)
- ÆÐŰÁö ±âÆÇ(substrate)¶óÀÎÀÇ µµ±Ý °øÁ¤ °ü·Ã ¼Â¾÷/±¸Ãà °æÇèÀÚ (Çʼö)
[±Ù¹«Áö]
- °æ³² â¿ø½Ã (±â¼÷»ç Á¦°ø)
[ÀüÇü¹æ¹ý]
- ¼·ùÀüÇü -> 1Â÷ ±â¼ú¸éÁ¢ -> 2Â÷ Àμº¸éÁ¢ -> ä¿ë°ËÁø